000 00687cam a2200241 4500
003 OSt
005 20230831081252.0
020 _a9788181479891
040 _aDLC
_cDLC
_dDLC
_bEng
_erda
041 _aEng
050 0 0 _aTS230;
_bB423.
100 1 _aBeeley, Peter R.
245 1 0 _aFoundry technology
_cP. R. Beeley.
260 _aNew York,
_bHalsted Press Division, Wiley:
_c1972.
300 _a544 pages /
_billus.
_c25 cm.
336 _2rdacontent
_atext
_btxt
337 _2rdamedia
_aunmediated
_bn
338 _2rdacarrier
_avolume
_bnc
504 _aIncludes bibliographical references.
650 0 _aFounding.
906 _a7
_bcbc
_corignew
_d1
_eocip
_f19
_gy-gencatlg
942 _2lcc
_cBK
999 _c4003
_d4003