Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS / edited by Kiyotaka Wasa, Isaku Kanno and Hidetoshi Kotera [textbook]

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Material type: Text

TextPublication details: Waltham, MA : William Andrew, 2012Edition: Second editionDescription: xii, 644 pages : illustrations ; 24 cmISBN:

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Holdings
Item type	Current library	Home library	Shelving location	Call number	Copy number	Status	Date due	Barcode
Books	Harare Institute of Technology Main Library	Harare Institute of Technology Main Library	General Collection	TS695 HAN (Browse shelf(Opens below))	1	Available		BK0012391

Includes bibliographical references and index.

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