Handbook of sputter deposition technology :  fundamentals and applications for functional thin films, nanomaterials and MEMS /  [textbook] 
edited by Kiyotaka Wasa, Isaku Kanno and Hidetoshi Kotera 
 - Second edition / 
 - Waltham, MA :  William Andrew,  2012 
 - xii, 644 pages :  illustrations ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781437734836 1437734839 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cathode sputtering (Plating process)--Handbooks, manuals, etc.<br/>Thin films--Handbooks, manuals, etc.
<br/><br/><label>LC Class. No.: </label>TS695  / HAN